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Innores Co., Ltd.
[Korea]
Address:
#205, Sungshin-Techno Park, 509-7, Maetan 3-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do 443-803 Korea
Phone:
82-31-2748431
Contact name:
Jeanie Park
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Innores Co., Ltd.
 
Seal & O-Ring

FKM

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FKM
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 Model Number F-575

Description

F-575(VITON) has high resistance power against solvent and chemicals. It makes a good performance at high temperature. It is often used to product for sealing in semiconductor industry. When applied with Amin, Ammonia and hot Acid, it is not suitable.

Applicable Temperature

  • 20° ~ 220°C

Applicable Process

Some kinds of Sealing, Low CVD & PVD, Wet Etch & Dry Etch Process, Non-toxic Gas Seal, Some kinds of Valve o-ring, Center-ring

CERTIFICATE INSPECTION

PROPERTY DESCRIPTION TEST RESULT
TENSILE STRENGTH Mpa 14.9
ELONGATION AT BREAKE % 165
100% MODULUS Mpa 7.5
SHORE A HARDNESS ±2 78
MAX TEMPERATURE ℃ 200
COMPRESSION SET ON O-RING #214
@200℃ 70HRS		 25

LABORATORY TEST

※ TEST MARKS

  • A: Rate of volume increase within 5%
  • B: Rate of volume increase 5~20%
  • C: Rate of volume increase 20~50%
  • D: Rate of volume increase over 50%
Name of Chemicals Deposition Temperature Deposition
Time/Days		 FFKM
(TechRes)		 FKM
(Viton)
℃ ℉
(Acid fluids) 　 　 　 　 　
Acetic anhydride 50 104 31 B B
Chlorosulfonic acid 33 78 17 B D
Formic acid(88%) 44 100 26 A B
Glacial acetic acid 43 102 25 A D
Hydrochloric acid(35%) 41 105 25 A B
Hydrofluoric acid(50%) 88 176 10 A B
Hyrogen sulfide 60 144 10 B D
Nitric acid(60%) 42 104 26 B B
Phosphoric acid(45%) 60 150 6 A D
Phenol 210 430 6 A D
Sulfuric acid(98%) 44 102 11 A B

Related Keywords: FKM


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